Rectangular Slit Valve          

PL3600-0102A (Bellows type)         
High Vacuum(1×10-9 sccm/sec.He)            

¡Ü Different Opening Sizes          
   - 35*336 , Other Sizes on request            
¡Ü Space saving         
¡Ü Easy maintenance         

Rectangular Slit Valve          

PL3600-0102B (Elastomer seal type)          
Normal Vacuum(1×10-8 sccm/sec.He)          

¡Ü Different Opening Sizes          
   - 35*336 , Other Sizes on request            
¡Ü Space & Cost saving          
¡Ü Easy maintenance        
    

Throttle Valve          

B0103A-CSTV040          
Normal Vacuum(1×10-8 sccm/sec.He)          

¡Ü Space & Cost saving          
¡Ü Easy maintenance         


Dual Throttle Valve         

B0103B-CSTV160          
Normal Vacuum(1×10-8 sccm/sec.He)          

¡Ü Space & Cost saving          
¡Ü Dual type            
¡Ü Easy maintenance           


Rectangular Slit Valve          

S0250X (Bellows type)           
High Vacuum(1×10-9 sccm/sec.He)            

¡Ü Different Opening Sizes          
   - 46*236 , Other Sizes on request            
¡Ü Space & Cost saving          
¡Ü Easy maintenance        
¡Ü MONOVAT Applicable    


Pendulum Control Valve  
        

Developing¡¦.