Rectangular Slit Valve
PL3600-0102A (Bellows type)
High Vacuum(1×10-9 sccm/sec.He)
¡Ü Different Opening Sizes
- 35*336 , Other Sizes on request
¡Ü Space saving
¡Ü Easy maintenance
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Rectangular Slit Valve
PL3600-0102B (Elastomer seal type)
Normal Vacuum(1×10-8 sccm/sec.He)
¡Ü Different Opening Sizes
- 35*336 , Other Sizes on request
¡Ü Space & Cost saving
¡Ü Easy maintenance
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Throttle Valve
B0103A-CSTV040
Normal Vacuum(1×10-8 sccm/sec.He)
¡Ü Space & Cost saving
¡Ü Easy maintenance
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Dual Throttle Valve
B0103B-CSTV160
Normal Vacuum(1×10-8 sccm/sec.He)
¡Ü Space & Cost saving
¡Ü Dual type
¡Ü Easy maintenance
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Rectangular Slit Valve
S0250X (Bellows type)
High Vacuum(1×10-9 sccm/sec.He)
¡Ü Different Opening Sizes
- 46*236 , Other Sizes on request
¡Ü Space & Cost saving
¡Ü Easy maintenance
¡Ü MONOVAT Applicable
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Pendulum Control Valve
Developing¡¦.
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